The specific features and characteristics of the types 1479b, 2179b and 179b are described in extra chapters in this manual. Mks gseries mass flow controllers instruction manual. Typical manufacturers include brooks instruments, celerity, millipore tylan, mks. The digital mass flow controllers of the 1179b series accurately measure and control the mass flow rate of gases. Problems with generic mfcs coastal instruments mass.
Microprocessor driven digital flow controllers allow one to program, record, and analyze flow rates of various gases with a computer via an rs485 interface optional rs232 is available. Mks instruments mass flow controller mass flow controller. Mks mass flow controllers meters can be used with several mks electronics modules. A conventional mass flow controller only guarantees the flow rate accuracy with n2 gas and one controller would only handle one type of gas and one full scale flow rate range. To truly control any process, you must precisely measure what is happening in the feedline, in the chamber, at every point. Mass flow controllers pressure controllers valves capacitance manometers. The 1179c is a general purpose mass flow controller designed to measure and. Please see ge50a mass flow controllers on for additional configurations. A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a particular range of flow. Mks thermal mass flow controllers mfcs have gained wide acceptance due to. Controllers can be programmed for various control functions including flow set point, totalizer, stop totalizer, read totalizer, totalizer from preset flow. The type 1179a massflo controller and the type 2179a massflo controller with a positive shutoff valve, accurately measure and control the mass flow rates of gases.
Gseries mass flow controllers mks instruments, inc. The 1179 massflo controllers are available with full scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0. The digital mass flow controllers of the 1579a series accurately measure and control the mass flow rate of gases. The standard gsd file uses a default parameter set in the small setup structure. Mks warrants that for one 1 year from the date of shipment the equipment described above the equipment manufactured by mks shall be free from defects in materials and workmanship. The type 579ab of this series, however, is a mass flow meter for mass flow measurement only, therefore without a control valve.
Burkert celerity unit datametrics hitachi metals horibastec millipore tylan mks. Devicenet supplemental manual sla5800, slamf pressure. Mass flow controller model 5850e mass flow controller. However, thermal mass flow meters require a specific internal temperature profile for. Format of message sent from the mass flow controller. New listing mks instruments mass flow controller mfc type 2259c00020rv 20 sccm n2 ssbn496. The gseries ge50a digitallycontrolled mass flow controller is available with either rs485, profibus, ethercat, profinet, or devicenet io. Download mksmfcgxx, a labview serial plug and play projectstyle instrument driver for a g serial mass flow controller from mksinstruments, models. A mass flow controller mfc is a device used to measure and control the flow of liquids and gases. Mks instruments 1259 2259 series mass flow controllers. Mks type m100b massflo controller and m10mb massflo meter. The type 179b of this series is a mass flow meter for mass flow.
Coastal instruments services many of mks mass flow controller models. Our mass flow controller modules provide a compact and high density solution for integrating mks mfcs with the mks automation platform pac or cm modules. The type 579a of this series, however, is a mass flow meter for mass flow measurement only, therefore without a control valve. Get the best deals on mass flow controllers when you shop the largest online selection at. General purpose 10 sccm to 20 slm mass flow controller mks. If the gas were n2, the gas flow would be, 100 sccm x gcfn2 gcfar 100 sccm x 1. Kjlc offers a variety of mass flow controllers mfc from manufacturers like mks.
Thermal mass flow meters, regulators and controllers for gases. Manual digital mass flow controller 1579ab and digital. I have few mass flow controllers without the device which control them. Fast mass flow controllers and meters make process control and calibration processes more efficient. Dear all, first of all i have to say i am a chemist not an engineer. Mks type 1179a and 2179a massflo controller and type. The text file, referred to as the gas schedule, is nine column tab delimited file where the first column is the amount in seconds for which that gas flow. Features, benefits, and specifications for the mks instruments m330h and m330ah heatable mass flow controller \mfc\ for high temperature applications up to 150 degrees c. Aera mass flow controllers aera fcr7700 series pdf. A gsd file describes the device and defines the configuration parameter for the. Mks mass flow controller controller serial driver for. The pseries mfcs, with full scale ranges from 5 sccm to 250 slm nitrogen equivalent are designed for critical mass flow applications like those required in. Each mfc module supports integrating 4 mks mass flow controllers.
Many mass flow controller users have experienced costly problems using mfcs that were selected by the socalled generic mfc approach. The flow rate set point can be adjusted either through front panel. G series viton sealed 10 to 5,000 sccm mass flow controllers. Please find attached some pictures for more information. Represents the endof line delimiter or termination character specified in your communications. In addition, the electronics modules provide a readout of gas flow. The mks instruments 12592259 series are elastomersealed mass flow controllers designed for general purpose mass flow control applications covering a very large range. A major advantage of using this type of sensor is that the instruments measure direct mass flow. Mass flow controller sfc1480fx sfc2480fx series pdf.
The 247 4channel, sequentially selectable simple readout is designed to control and display any flow meter or controller. File numbers to be provided by mks applications engineering group. Fast, versatile and easy to use mce and mcv mass flow. A generic mfc is an mfc calibrated and labeled for one gas but used to control another gas. The 12592259 series unique control valve eliminate oscillation and offers better response time as compared to other flow controllers. Need mass flow controllers to replace mks 1179a and mks 2179a controllers.
Mks type 1179a and 2179a massflo controller and type 179a. Mfc tm digital mass flow controller low pressure mks instruments, inc. Mfc modules support either 15 or 9 pin analog mass flow controllers. The digital control electronics utilize the latest mks control algorithms for fast and repeatable response to set. Required for a mass flow controller, a device that contains a valve and a controller. Mass flow controllers enabling productivity through flow control innovation our wide range of mass flow controllers are available in thermal and pressure based sensor technologies, analog and digital communication, and metal or elastomer seals. Mks warrants that for one 1 year from the date of shipment the equipment described above the equipment manufactured by mks. Alta mass flow controllers metalsealed type 1480a the alldigital mks alta mass flow controller mfc includes technology improvements in functionality and performance to help. Warranty gseries mass flow controllers mks instruments, inc. The 1179c is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. Four channel flow controller power supply and readout mks. Guideline for pressure specifications of the mass flow controller. The actual flow dynamics are controlled, resulting in a much smoother transition to steadystate flow in the shortest period of time.
Mks coastal instruments mass flow controller specialists. Features, benefits, and specifications for the mks instruments 1640 pressurebased mass flo controller for ion implant applications, type 1640. For the period commencing with the date of shipment of this equipment and ending one 1 year later, mks. Mks instruments mass flow controller for sale in used. Pseries high performance mfcs feature full digital control architecture for fast response to setpoint over the operable device range. The gas scheduler program uses the gas controller to automate automate the switching of gasses based on the instructions provided in a text file. Based upon a patented mks measurement technique, these instruments use a laminar flow. The computer designed control valves allow stable operation over a wide variety of flow and pressure conditions.
This conforms to the enhanced mfc profile, device type 27hex. The digital control electronics utilize the latest mks control algorithms for fast and repeatable response to setpoint throughout the device control. Offering state of the art performance in high temperature gas measurement and control, the 5850emh series high temperature metal sealed mass flow controller from brooks instrument. Accurate, reliable gas flow delivery and control is crucial to many of todays advanced processes. The documents listed below are referenced throughout this manual. Alicat offers many ways to customize your gas flow meter or controller for use in low. Ge50a elastomersealed 550,000 sccm mass flow controllers. Not supported in a mass flow meter device an mfc without a valve or a controller. Coastal instruments mass flow controller specialists since 1980.
The digital mass flow controllers of the 1579ab series accurately measure and control the mass flow rate of gases. These modules provide power and a set point signal to the mass flow controller. Devicenet supplemental manual for gf100 series mass flow. Our wide range of mass flow controllers are available with thermal or pressure based sensors, analog and digital communication and metal or elastomer seals. Mass flow controller safety information 9 mass flow controller safety information symbols used in this instruction manual definitions of warning, caution, and note messages used. The mass flow meter 179b will only be mentioned in particular where this is necessary, else wise the instructions for the 1179b also apply for the meter 179b. Pressurebased pi mass flow controller ps100 series pdf. Thermal mass flow meters, regulators and controllers for. Massflo is a registered trademark of mks instruments, inc.
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